Electure 'Electrostatic comb actuator'
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Metadata:
Title: Electrostatic comb actuator
Lecturer(s): Prof. Dr. Ulrike Wallrabe
Date: 2008-05-20
Modul: Micro-actuators
Keywords: Electrostatic comb actuator, Comb actuator, Example: Coriolis gyroscope, Gyrometer, LIGA gyrometer system with comb actuator, Fiber switch for optical communications technology, Rotation with comb actuators, Stacked vertical comb actuator, Multi-stage DRIE process, Out-of-plane comb actuator (multi-layered), Self-aligned comb actuator, REM photos, Out-of-plane comb actuator (plastic deformation), Process sequence, Voltage-strain-curve of silicon, Electrical heating for deformation, Deformed plastic 2D micromirror, Characterization: Lissjous figures
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